“Semiconductors play a pivotal role in AI transformation, acting as a catalyst for the advancement of numerous industries. A retrospective review of semiconductor development reveals that the current dominant design is dictated by mask technology. Innovations in mask‐related technologies—such as Phase-Shift Masks (PSM), pellicles, automated inspection, data formats, e-beam lithography, and the optimized mask size—have enabled ultra-high yields and large-scale manufacturing.”

“For more than five decades, semiconductor progress has been driven primarily by Moore’s Law, focusing on device pitch shrinkage. However, the emergence of advanced packaging and multi-die architectures has fostered the growth of “More-Than-Moore” technologies that emphasize system-level optimization in addition to traditional scaling. Masks will inevitably remain a cornerstone of both “More-Moore” and “More-Than-Moore” pathways.”

“A survey of 16 leading mask suppliers indicates a consensus that establishing a Mask Roadmap Committee is essential for sustained progress, and that collaborative efforts among stakeholders are required to achieve this goal.”

Jin Choi, Samsung, EMLC 2026 in Germany